ZnAl target preparation method and prepared ZnAl target

制备ZnAl靶材的方法以及制得的ZnAl靶材

Abstract

提供了一种制备ZnAl合金靶材的方法,所述方法包括以下步骤:(1)提供锌粉和铝粉的混合物;(2)通过放电等离子烧结工艺烧结锌粉和铝粉的混合物得到ZnAl合金。还提供了一种由上述方法得到的ZnAl合金靶材。
The invention provides a ZnAl target preparation method, which comprises the following steps: (1) providing a mixture of zinc powder and aluminum powder; and (2) sintering the mixture of the zinc powder and the aluminum powder through a discharge plasma sintering process to obtain ZnAl alloy. The invention also provides a ZnAl alloy target prepared by the method.

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Cited By (2)

    Publication numberPublication dateAssigneeTitle
    US-9162286-B2October 20, 2015Shenzhen China Star Optoelectronics Technology Co., Ltd.Glass substrate film sputtering target and preparing method thereof
    WO-2013082822-A1June 13, 2013深圳市华星光电技术有限公司玻璃基板薄膜溅射靶材及其制备方法