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  • Publication Date: December 31, 1969
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    CN-102738056-AOctober 17, 2012清华大学一种利用气缸伸缩的推杆式晶圆夹持装置
    EP-2033745-A3May 13, 2009Nidec Sankyo CorporationIndustrial robot
    JP-2014057025-AMarch 27, 2014Tokyo Electron Ltd, 東京エレクトロン株式会社Spacer, transportation method of spacer, processing method, and processing apparatus
    US-2008100983-A1May 01, 2008Axcelis Technologies, Inc.Sliding wafer release gripper / wafer peeling gripper
    US-2009196718-A1August 06, 2009Inotera Memories, Inc.Holding apparatus
    US-2009232630-A1September 17, 2009John RobertsTendon enhanced end effector
    US-7751172-B2July 06, 2010Axcelis Technologies, Inc.Sliding wafer release gripper/wafer peeling gripper
    US-7988216-B2August 02, 2011Inotera Memories, Inc.Holding apparatus
    US-8146973-B2April 03, 2012Applied Materials, Inc.Tendon enhanced end effector
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    WO-2013000423-A1January 03, 2013清华大学Pushrod-type wafer holder apparatus using cylinder for reciprocation
    WO-2013000428-A1January 03, 2013清华大学一种利用线绳弹簧拉伸的推杆式晶圆夹持装置